Femtosecond laser-based technology for fast development of micromechanical devices

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 31-34

  Baehnisch, R ^a   Gross, W ^a   Staud, J ^a   Menschig, A ^a  

^a GERMAN AEROSPACE CENTER DLR   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LASER APPLICATIONS; MASKS; MICROMACHINING;

DESIGN CONCEPT; FEMTOSECOND LASER; MICRO MANIPULATORS; MICROMECHANICAL DEVICES; PROCESS TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0032656843     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00333-1     Document Type: Article

References (10)

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