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Volumn 69, Issue , 1999, Pages 143-148
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Electrical characterization of as-grown and thermally treated 8 inches silicon wafers
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CHARGE CARRIERS;
DIFFUSION IN SOLIDS;
SEMICONDUCTOR GROWTH;
SURFACE RECOMBINATION VELOCITY;
SILICON WAFERS;
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EID: 0032655318
PISSN: 10120394
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (3)
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References (8)
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