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Volumn 69, Issue , 1999, Pages 143-148

Electrical characterization of as-grown and thermally treated 8 inches silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHARGE CARRIERS; DIFFUSION IN SOLIDS; SEMICONDUCTOR GROWTH;

EID: 0032655318     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (3)

References (8)
  • 7
    • 0003864995 scopus 로고
    • Springer Series in Material Science Springer-Verlag, Berlin- Heidelberg, H.J. Queisser ed.
    • S.J. Pearton, J. W. Corbett and M Stavola: "Hydrogen in Crystalline Semiconductors" Springer Series in Material Science 16, Springer-Verlag, Berlin- Heidelberg, H.J. Queisser ed. (1992).
    • (1992) Hydrogen in Crystalline Semiconductors , vol.16
    • Pearton, S.J.1    Corbett, J.W.2    Stavola, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.