Modeling of texture evolution in copper interconnects annealed in trenches

Scripta Materialia

Volumn 41, Issue 4, 1999, Pages 403-408

  Riege, Stefan P ^a   Thompson, Carl V ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANNEALING; CHEMICAL POLISHING; CRYSTAL ORIENTATION; FINITE ELEMENT METHOD; GRAIN BOUNDARIES; GRAIN GROWTH; INTERFACIAL ENERGY; MATHEMATICAL MODELS; STRESS ANALYSIS; TEXTURES; THERMAL EXPANSION;

THERMAL EXPANSION COEFFICIENT;

COPPER;

EID: 0032654502     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(99)00098-6     Document Type: Article

References (22)

1. D. Edelstein, J. Heidenreich, R. Goldblatt, W. Cote, C. Uzoh, N. Lustig, P. Roper, T. McDevitt, W. Motsiff, A. Simon, J. Dukovic, R. Wachnik, H. Rathore, R. Schulz, L. Su, S. Luce, and J. Slattery, IEEE Int. Electron Devices Meeting Dig. 773 (1997).
2. Knorr D.B. Proc. Mater. Res. Soc. Symp. 309:1993;75.
3. th International Reliability Physics Symposium, p. 342 (1998).
4. Lingk C., Gross M.E. J. Appl. Phys. 84:1998;5547.
5. Rodbell K.P., Knorr D.B., Tracy D.P. Proc. Mater. Res. Soc. Symp. 265:1992;107.
6. M. E. Gross, C. Lingk, T. Siegrist, E. Coleman, W. L. Brown, K. Ueno, Y. Tsuchiya, N. Itoh, T. Ritzdorf, J. Turner, K. Gibbons, E. Klawuhn, M. Biberger, W. Y. C. Lai, J. F. Miner, G. Hu, and F. Zhang, Proc. Mater. Res. Soc. 518 (1998), in press.
7. Lingk C., Gross M.E., Brown W.L. Appl. Phys. Lett. 74:1999;682.
8. Hsu W.-Y., Hong Q.-Z., Chen L.-Y., Lu Y.-C., Wilson A., Cordasco V., Jain M., Tao R., Luttmer J.D., Havemann R.H., Mosely R. Advanced Metallization and Interconnect Systems for ULSI Applications. 1998;413 Materials Research Society, Warrendale, PA.
9. L. Vanasupa, Y.-C. Joo, P. R. Besser, and S. Pramanick, J. Appl. Phys., submitted.
10. Vinci R.P., Zielinski E.M., Bravman J.C. Proc. Mater. Res. Soc. Symp. 338:1994;289.
11. J. Sanchez, Jr., and P. R. Besser, International Interconnect Conference 6/98, San Francisco, CA.
12. Carel R., Thompson C.V., Frost H.J. Acta Mater. 44:1996;2479.
13. Sauter A.I., Nix W.D. IEEE Trans. Comp. 15:1992;594.
14. Nye J.F. Physical Properties of Crystals. 1995;Oxford University Press, New York.
15. Dieter G.E. Mechanical Metallurgy. 1986;McGraw-Hill, New York.
16. Simmons G., Wang H. Single Crystal Elastic Constants and Calculated Aggregate Properties A Handbook . 1971;M.I.T. Press, Cambridge, MA.
17. M. McLean and B. Gale, Phil. Mag. 20, 1033 (1969); M. McLean, Acta Metall. 19, 387 (1971).
18. M. McLean and B. Gale, Phil. Mag. 20, 1033 (1969); M. McLean, Acta Metall. 19, 387 (1971).
19. Li D.Y., Szpunar J.A. J. Mater. Sci. 32:1997;5513.
20. Touloukian Y.S., Kirby R.K., Taylor R.E., Desai P.D. Thermophysical Properties of Matter. 1985;12 IFI/Plenum Press, New York.
21. Vinci R.P., Bravman J.C. Proc. Mater. Res. Soc. Symp. 436:1997;411.
22. Abaqus, Version 5.8, general purpose finite element program, Hibbit, Karlson, and Sorensen, Inc., Pawtucket, RI (1998).