Micromechanical light modulators, pressure gauges, and thermometers attached to optical fibers

Journal of Micromechanics and Microengineering

Volumn 7, Issue 4, 1997, Pages 343-352

  Greywall, Dennis S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTICS; LIGHT MODULATORS; PRESSURE GAGES; THERMOMETERS;

OPTOMECHANICAL DEVICES;

MICROMACHINING;

EID: 0031333929     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/4/011     Document Type: Article

References (3)

1. Goossen K W, Walker J A and Arney S C 1989 Silicon modulator based on mechanically-active anti-reflection layer with 1 Mbit/sec capability for fiber-in-the-loop applications IEEE Phot. Tech. Lett. 1 61-4
2. Marxer C, Gretillat M A, Jaecklin V P, Baettig R, Anthamatten O, Vogel P and De Rooij N F 1995 MHz opto-mechanical modulator Eighth Int. Conf. on Solid-State Sensors and Actuators, and Eurosensors IX vol 66, pp 289-92
3. Greywall D S, Busch P A and Walker J A 1997 Phenomenological model for gas damping of micromechanical structures J. Phys. D: Appl. Phys. submittedS