Rare earth impurities and impurity-related centers in silicon

Solid State Phenomena

Volumn 69, Issue , 1999, Pages 365-370

  Emtsev, V V ^a   Emtsev Jr , V V ^a   Poloskin, D S ^a   Shek, E I ^a   Sobolev, N A ^a   Michel, J ^b   Kimerling, L C ^b  

^a IOFFE INSTITUTE   (Russian Federation)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH FROM MELT; IMPURITIES; ION IMPLANTATION; RARE EARTH ELEMENTS; SEMICONDUCTOR DOPING;

IMPURITY-RELATED CENTERS;

SEMICONDUCTING SILICON;

EID: 0032644532     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.365     Document Type: Article

References (11)

1. J.L. Benton, J. Michel, L.C. Kimerling, D.C. Jacobson, Y.H. Xie, D.J. Eaglesham, E.A. Fitzgerald, and J.M. Poate, J. Appl. Phys. 70 (1991), p. 2667.
2. S. Libertino, S. Coffa, G. Franzó, and F. Priolo, J. Appl. Phys. 78 (1995), p. 3867.
3. H. Przybylinska, W. Jantsch, Yu. Suprun-Belevitch, M. Stepikhova, L. Palmetshofer, G. Hendorfer, A. Kozanecki, R.J. Wilson, and B.J. Sealy, Phys.Rev. B54 (1996), p. 2532.
4. V.V. Emtsev, V.V. Emtsev, Jr., D.S. Poloskin, E.I. Shek, N.A. Sobolev, J.Luminescence 80 (1999), p. 391.
5. J. Michel, L.J. Benton, R.F. Ferrante, D.C. Jacobson, D.J. Eaglesham, E.A. Fitzgerald, Y.-H. Xie, J.M. Poate, and L.C. Kimerling, J. Appl. Phys. 70 (1991), p. 2672.
6. V.V. Emtsev, G.A. Oganesyan, and K. Schmalz, Sol.St.Phenomena, vols 47-48, eds H. Richter, and M. Kittler, and C. Claeys (Scitec Publications Ltd, Switzerland, 1996), pp. 259-266.
7. V.V. Emtsev, D.S. Poloskin, N.A. Sobolev, and E.I. Shek, Fiz.Tekh.Poluprovodn. 28 (1994), p. 1084 [Semiconductors (AIP) 28 (1994), p. 624].
8. V.V. Emtsev, D.S. Poloskin, N.A. Sobolev, and E.I. Shek, Fiz.Tekh.Poluprovodn. 28 (1994), p. 1084 [Semiconductors (AIP) 28 (1994), p. 624].
9. F. Priolo, G. Franzó, S. Coffa, and A. Carnera, Phys.Rev. B 57 (1998), p. 4443.
10. J. Palm, F. Gan, B. Zheng, J. Michel, and L.C. Kimerling, Phys. Rev. B 54 (1996), p. 17 603.
11. F. Priolo, G. Franzó, S. Coffa, A. Polman, S. Libertino, R. Barklie, D. Carey, J. Appl. Phys. 78 (1995), p. 3874.