Laser polishing of diamond plates

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 1, 1999, Pages 81-88

  Pimenov, S M ^a   Kononenko, V V ^a   Ralchenko, V G ^a   Konov, V I ^a   Gloor, S ^b   Luthy W ^b   Weber, H P ^b   Khomich, A V ^c  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b UNIVERSITY OF BERN   (Switzerland)

^c INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; GAS LASERS; INFRARED SPECTROSCOPY; LASER ABLATION; LASER APPLICATIONS; LIGHT ABSORPTION; LIGHT TRANSMISSION; POLISHING; SURFACE ROUGHNESS; THERMOOXIDATION; THICK FILMS; ULTRAVIOLET SPECTROSCOPY;

OPTICAL LOSSES;

DIAMOND FILMS;

EID: 0032644350     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050975     Document Type: Article

References (29)

1. Y. Tzeng: Diamond Films Technol. 1, 31 (1991)
2. G. Lu, K.J. Gray, E.F. Borchelt, L.K. Bigelow, J.E. Graebner: Diamond Relat. Mater. 2, 1064 (1993)
3. R.S. Sussmann, J.R. Brandon, G.A. Scarsbrook, C.G. Sweeney, T.J. Valentine, A.J. Whitehead, C.J.H. Wort: Diamond Relat. Mater. 3, 303 (1994)
4. D.C. Harris: In Proc. 3rd Int. Conf. on Applications of Diamond Films and Related Materials, ed. by A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa, M. Murakawa (NIST Spec. Publ. 885, Washington, DC 1995) p. 539
5. V.G. Ralchenko, S.M. Pimenov: In Handbook of Industrial Diamonds and Diamond Films, ed. by M.A. Prelas, G. Popovici, L.K. Bigelow (Marcel Dekker, New York 1997) p.983
6. V.P. Ageev, L.L. Bouilov, V.I. Konov, A.V. Kuzmichov, S.M. Pimenov, A.M. Prokhorov, V.G. Ralchenko, B.V. Spitsyn, N.I. Chapliev: Sov. Phys.-Doklady 33, 840 (1988)
7. V.G. Ralchenko, S.M. Pimenov: Diamond Films Technol. 7, 15 (1997)
8. M. Yoshikawa: Diamond Films Technol. 1, 1 (1991)
9. T. Chein, C. Cutshaw, C. Tanger, Y. Tzeng: In Proc. 3rd Int. Conf. on Applications of Diamond Films and Related Materials, ed. by A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa, M. Murakawa (NIST Spec. Publ. 885, Washington, DC 1995) p. 257
10. V.I. Konov: In Proc. Int. Business Conf. on CVD Diamond & DLC Coatings and Thick Film Market (Atlanta, Georgia, USA, March 11-13, 1996)
11. A.V. Khomich, V.V. Kononenko, S.M. Pimenov, V.I. Konov, S. Gloor, W. Lüthy, H.P. Weber: SPIE Proc. 3484, 166 (1998)
12. S. Gloor, W. Lüthy, H.P. Weber, S.M. Pimenov, V.G. Ralchenko, V.I. Konov, A.V. Khomich: Appl. Surf. Sci. 138-139, 135 (1999)
13. V.G. Ralchenko, A.A. Smolin, V.I. Konov, K.F. Sergeichev, I.A. Sychov, I.I. Vlasov, V.V. Migulin, S.V. Voronina, A.V. Khomich: Diamond Relat. Mater. 6, 417 (1997)
14. S. Gloor, W. Lüthy, H.P. Weber: Diamond Films Technol. 7, 233 (1997)
15. S.M. Pimenov, A.A. Smolin, V.G. Ralchenko, V.I. Konov: Diamond Films Technol. 2, 201 (1993)
16. P. Tosin, A. Blatter, W. Lüthy: J. Appl. Phys. 78, 3797 (1995)
17. S.M. Pimenov, A.A. Smolin, V.G. Ralchenko, V.I. Konov, G.A. Sokolina, S.V. Bantsekov, B.V. Spitsyn: Diamond Relat. Mater. 2, 291 (1993)
18. L.G. Johnson, G. Dresselhaus: Phys. Rev. B 7, 2273 (1973)
19. J.M. Zhang, P.C. Eklund: J. Mater. Res. 2, 858 (1987)
20. W.J.P. van Enckevort: J. Appl. Cryst. 20, 11 (1987)
21. V.G. Ralchenko, S.M. Pimenov, T.V. Kononenko, K.G. Korotushenko, A.A. Smolin, E.D. Obraztsova, V.I. Konov: In Proc. 3rd Int. Conf. on Applications of Diamond Films and Related Materials, ed. by A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa, M. Murakawa (NIST Spec. Publ. 885, Washington, DC 1995) p. 225
22. S. Gloor, S.M. Pimenov, E.D. Obraztsova, W. Lüthy, H.P. Weber: Diamond Relat. Mater. 7, 607 (1998)
23. E.D. Obraztsova, V.L. Kuznetsov, E.N. Loubnin, S.M. Pimenov, V.G. Pereverzev: In Proc. NATO ARW "Nanoparticles in Solids and Solutions", Vol. 18, ed. by J.H. Fendler, I. Dekany (Kluwer 1996) p. 485
24. A. Joshi, R. Nimmagadda, J. Herrington: J. Vac. Sci. Technol. A 8, 2137 (1990)
25. G. Compagnini: Appl. Opt. 33, 7377 (1994)
26. M. Freidrich, S. Morley, B. Mainz, H.-J. Hinneberg, D.R.T. Zahn: Diamond Relat. Mater. 4, 944 (1995)
27. A.V. Khomich, V.G. Ralchenko, A.A. Smolin, V.V. Migulin, S.M. Pimenov, V.I. Konov: J. Chem. Vapor Deposition 5, 361 (1997)
28. J.E. Graebner, J.A. Mucha, F.A. Baiocchi: Diamond Relat. Mater. 5, 682 (1996)
29. J.E. Graebner: Diamond Relat. Mater. 4, 1196 (1995)