Laser ablation of diamond films in various atmospheres

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 607-611

  Gloor, S ^a   Pimenov, S M ^b   Obraztsova, E D ^b   Luthy W ^a   Weber, H P ^a  

^a Institute for Applied Physics   (Switzerland)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

Diamond films; Etching; Laser; Post deposition polishing

Indexed keywords

AIR; ETCHING; EXCIMER LASERS; GASES; IRRADIATION; LASER ABLATION; THIN FILMS;

POST-DEPOSITION POLISHING;

DIAMOND FILMS;

EID: 0031994420     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00288-4     Document Type: Article

References (12)

1. V.G. Ralchenko, S.M. Pimenov, Diamond Films Technol. 7 (1997) 15.
2. V.N. Tokarev, J.I.B. Wilson, M.G. Jubber, P. John, D.K. Milne, Diamond Relat. Mater. 4 (1995) 169-176.
3. V.G. Ralchenko, K.G. Korotushenko, A.A. Smolin, E.N. Loubnin, Diamond Relat. Mater. 4 (1995) 893-896.
4. Dong-Gu Lee, S.D. Harkness, R.K. Singh, Mater. Res. Soc. Symp. Proc. 339 (1994) 127-132.
5. B. Bhushan, V.V. Subramaniam, B.K. Gupta, Diamond Films Technol. 4 (2) (1994) 71-97.
6. V.P. Ageev, L.L. Bouilov, V.I. Konov, A.V. Kuzmichev, S.M. Pimenov, A.M. Prokhorov, V.G. Ralchenko, B.V. Spitsyn, N.I. Chapliev, Soviet Physics-Doklady 33 (1988) 840.
7. G.A. Shafeev, E.D. Obraztsova, S.M. Pimenov, Appl. Phys. A 65 (1997) 29-32.
8. M. Rothschild, C. Arnone, D.J. Ehrlich, J. Vac. Svi. Technol. 4 (1986) 310.
9. P. Tosin, A. Blatter, W. Lüthy, J. Appl. Phys. 78 (6) (1995) 3797-3800.
10. S. Gloor, W. Lüthy, H.P. Weber, Diamond Films Technol., in press.
11. M. von Allmen, Laser-beam Interactions with Materials, Springer, Berlin, 1987.
12. V.P. Ageev, A.I. Barchukov, F.V. Bunkin, V.I. Konov, A.S. Silenok, N.I. Chapliev, Sov. Quant. Electr. 4 (1977) 310.