Micro sensor developments in Japan

Sensor Review

Volumn 19, Issue 1, 1999, Pages 37-42

  Tsuruta, Kazuhiro ^a   Mikuriya, Yoshikazu ^a   Ishikawa, Yuichi ^a  

^a Micromachine Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL APPLICATIONS; MAINTENANCE; MEDICAL APPLICATIONS; MICROMACHINING; POWER PLANTS; REPAIR;

MICROMACHINE TECHNOLOGY;

MICROSENSORS;

EID: 0032644125     PISSN: 02602288     EISSN: None     Source Type: Journal    
DOI: 10.1108/02602289910255568     Document Type: Article

References (14)

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2. Koga, A., Suzumori, K., Sudo, H., Ilkura, S. and Kimura, M., "Electrostatic linear microactuator mechanism for focusing a CCD camera", Tech. Digest. International Conference on Optical MEMS and their Applications (MOEMS97), Nara, Japan, November 1997, pp. 50-5.
3. Maeda, S., Abe, K., Yamamoto, K., Tohyama, O. and Ito, H., "Active endscope with SMA (shaft memory alloy) coil springs", Proc. IEEE Micro Electro Mechanical Systems Workshop, San Diego, CA, February 1996, pp. 290-5.
4. Hosotani, K., Maeda, S., Tohyama, O. and Ito, H., "Fiberscope-type environmental monitoring devices with binocular parallax accommodation mechanism for stereoscopic observation", Proc. IEEE Micro Electro Mechanical Systems Workshop, Nagoya, Japan, January 1997, pp. 400-5.
5. Ikeda, M., Goto, H., Totani, H., Sakata, M. and Yada, T., "Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror", Proc. SPIE Photonic West'97, San Jose, February 1997.
6. Nakamura, K., Takahata, K., Ono, A., Ogura, H. and Aoki, S., "An electrostatic micro wobble motor for nondestructive testing", Proc. The First International Micromachine Symposium, November 1995, Tokyo, pp. 147-50.
7. Suzuki, H., Teshigahara, A., Nagakubo, M. and Hattori, T., "Sensing head for ultrasonic made by direct bonding", T.IEEE Japan, Vol. 117-E No. 10, 1997, pp. 513-18.
8. Takeuchi, Y, Nozaki, M., Hirata, Y, Takada, H. and Smith, L.S., "Novel 1-3 piezo-composites using synchrotron radiation lithography and its application for high frequency medical imaging arrays", Proc. IEEE International Ultrasonics Symposium, October 1997.
9. Onoe, Y, Kishi, N., Hara, H. and Yamagishi, H., "An antenna-coupled electric wave detector for microwave and infrared ray", Proc. The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, June 1995, pp. 355-8.
10. Hara, H. and Yamagishi, H., "Micro variable infrared filter", Technical Digest of the 16th Sensor Symposium, Kawasaki, Japan, June 1998, pp. 73-6.
11. Miyajima, H., Yamamoto, E., Ito, M., Hashimoto, S., Komazaki, I., Shinohara, S. and Yanagisawa, K., "Optical micro encoder using surface-emitting laser", Proc. IEEE Micro Electro Mechanical Systems Workshop, San Diego, CA, February 1996, pp. 412-17.
12. Tohyama, O., Maeda, S. and Itoh, H., "A fibre-optic tactile microsensor for detection of tip of a fiberscope", Proc. IEEE/LEOS Summer Topical Meeting on Optical MEMS, July 1998, pp. 41-2.
13. Maezawa, M., Imahashi, T., Kuroda, Y, Adachi, H. and Yanagisawa, K., "Tactile sensor using piezoelectric resonator", Proc. 1997 International Conference on Solid-State Sensors and Actuators, Chicago, June 1997, pp. 117-20.
14. Tanaka, K., Mochida, Y., Sugimoto, S., Moriya, K., Hasegawa, T., Atsuchi, K. and Ohwada, K., "A micromachined vibrating gyroscope", Proc. IEEE Micro Electro Mechanical Systems Workshop, Amsterdam, January 1995, pp. 278-81.