Indium-doped zinc oxide films prepared by simultaneous r.f. and d.c. magnetron sputtering

Surface and Interface Analysis

Volumn 28, Issue 1, 1999, Pages 271-274

  Zhang, Keran ^a   Zhu, Furong ^a   Huan, C H A ^a   Wee, A T S ^a   Osipowicz, T ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOPING (ADDITIVES); INDIUM; MAGNETRON SPUTTERING; OPTICAL FILMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROPHOTOMETRY; TRANSPARENCY; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

TRANSPARENT CONDUCTING OXIDE;

CONDUCTIVE FILMS;

EID: 0032642617     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199908)28:1<271::AID-SIA592>3.0.CO;2-1     Document Type: Article

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