Influence of ion current on the growth of carbon films by ion-beam-assisted deposition

Diamond and Related Materials

Volumn 8, Issue 10, 1999, Pages 1944-1950

  Gago, R ^a   Bohme O ^a   Albella, J M ^a   Roman E ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Amorphous carbon; Growth; Ion assisted deposition; Spectroscopy

Indexed keywords

AMORPHOUS FILMS; ARGON; AUGER ELECTRON SPECTROSCOPY; DEPOSITION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; EVAPORATION; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; RAMAN SPECTROSCOPY;

ION-BEAM-ASSISTED DEPOSITION (IBAD); KAUFFMAN ION GUNS;

GRAPHITE;

EID: 0032641117     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00166-1     Document Type: Article

References (30)

1. Robertson J. Current Opin. Solid State Mater. Sci. 1:1996;557.
2. Robertson J. Adv. Phys. 35:1986;317.
3. Angus J.C., Hayman C.C. Science. 241:1988;913.
4. Angus J.C., Jansen F. J. Vac. Sci. Technol. A. 6:(3):1988;1778.
5. Lifshitz Y., Kasi S.R., Rabalais J.W. Phys. Rev. B. 41:(15):1990;10468.
6. Robertson J. Diamond Relat. Mater. 3:1994;361.
7. R. Gago, I. Jimenez, J.M. Albella, A. Climent-Font, L. Terminello, J.C. Banks, B.L. Doyle, Diamond Relat. Mater., submitted for publication.
8. Robertson J., O'Reilly E.P. Phys. Rev. B. 35:(6):1987;2946.
9. Weiler M., Sattel S., Giessen T., Jung K., Ehrhardt H. Phys. Rev. B. 53:1996;1594.
10. Robertson J. Diamond Relat. Mater. 1:1992;397.
11. André B., Rossi F., Dunlop H. Diamond Relat. Mater. 1:1992;307.
12. Kleber R., Weiler M., Krüger A., Sattel S., Kunz G., Jung K., Ehrhardt H. Diamond Relat. Mater. 2:1993;246.
13. Ullmann J., Falke U., Scharff W., Schröer A., Wolf G.K. Thin Solid Films. 232:1993;154.
14. Gissler W., Hammer P., Haupt J. Diamond Relat. Mater. 3:1994;770.
15. Bou P., Vandenbulcke J. J. Electrochem. Soc. 138:(10):1991;2991.
16. Tamor M.A., Vassell W.C. J. Appl. Phys. 50:1994;3823.
17. Boyd K.J., Marton D., Todorov S.S., Al-Bayati A.H., Kulik J., Zuhr R.A., Rabalais J.W. J. Vac. Sci. Technol. A. 13:(4):1995;2110.
18. Martín-Gago J.A., Fraxedas J., Ferrer S., Comin F. Surf. Sci. Lett. 260:1992;L17.
19. Steffen H.J., Roux C.D., Marton D., Rabalais J.W. Phys. Rev. B. 44:(8):1991;3981.
20. Grossman E., Lempert G.D., Kulik J., Marton D., Rabalais J.W., Lifshitz Y. Appl. Phys. Lett. 68:1996;1214.
21. Prawer S., Nugent K.W., Lifshitz Y., Lempert G.D., Grossman E., Kulik J., Avigal I., Kalish R. Diamond Relat. Mater. 5:1996;433.
22. Dillon R.O., Woollam J.A. Phys. Rev. B. 29:(6):1984;3482.
23. Scheibe H.J., Drescher D., Alers P. Fres. J. Anal. Chem. 353:1995;695.
24. Gouzman I., Brener R., Cytermann C., Hoffman A. Surf. Interf. Anal. 22:1994;524.
25. Reinke P., Franz G., Oelhafen P. Phys. Rev. B. 54:(10):1996;7067.
26. Fuchs A., Scherer J., Jung K., Ehrhardt H. Thin Solid Films. 232:1993;51.
27. Robertson J. Diamond Relat. Mater. 2:1993;984.
28. Gago R., Sánchez O., Climent-Font A., Albella J.M., Román E., Raühala E., Raisänen J. Thin Solid Films. 338:(1-2):1999;88.
29. Tallant D.R., Parmeter J.E., Siegal M.P., Simpson R.L. Diamond Relat. Mater. 4:1995;191.
30. Akkerman Z.L., Efstathiadis H., Smith F.W. J. Appl. Phys. 80:(5):1996;3068.