Effect of additives on the viscosity of dimethylaluminum hydride and FTIR diagnostics of the gas-phase reaction

Thin Solid Films

Volumn 348, Issue 1, 1999, Pages 130-133

  Lee, Jung Hyun ^a   Park, Man Young ^a   Yun, Jong Ho ^a   Rhee, Shi Woo ^a  

^a Pohang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; ADDITIVES; ALUMINUM; AMINES; DIMERS; DISSOCIATION; ELECTRONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; METHANE; TEMPERATURE; VISCOSITY;

BENZYLPYRIDINE; DIETHYLPHENYLPHOSPHINE; DIMETHYLALUMINUM HYDRIDE; ELECTRON DONATING ABILITY; GAS PHASE REACTION; STERIC EFFECT; TRIBENZYLPHOSPHINE; TRIHEXYLAMINE;

HYDROCARBONS;

EID: 0032634618     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00028-0     Document Type: Article

References (19)

1. Norman J.A.T., Muratore B.A., Dyer P.N., Roberts D.A., Hochberg A.K., Dubois L.H. Mater. Sci. Eng. B. 17:1993;87.
2. Hampden-Smith M.J., Kodas T.T. Polyhedron. 14:1995;699.
3. Kondoh E., Ohta T. J. Vac. Sci. Technol. A. 13:1995;2863.
4. Healy M.D., Norman J.A.T., Hochberg A.K. Tu K.N., Mayer J.W., Poate J.M., Che L.J. Advanced Metallization for Future ULSI. 1996;289 Materials Research Society.
5. E. Kondoh, T. Mitomo, H. Yamamoto, T. Ohta, US patent 5,552,181 (1996).
6. Kaloyeros A.E., Thomas M.E., Norman J., Sullivan J.J. Semicond. Int. 19:1996;127.
7. Yun J.-H., Lee J.-H., Park J., Rhee S. J. Electrochem. Soc. 145:1998;L23.
8. Parkas J., Hampden-Smith M.J., Kodas T.T. J. Electrochem. Soc. 141:1994;3539.
9. Parkas J., Hampden-Smith M.J., Kodas T.T. J. Electrochem. Soc. 141:1994;3547.
10. Hanaoka K.-I., Ohnishi H., Tachibana K. Jpn. J. Appl. Phys. (part 1). 32:1993;4774.
11. Kawahara T., Yuuki A., Matsui Y. Jpn. J. Appl. Phys. (part 1). 31:1992;2925.
12. Yun J.-H., Park M.-Y., Rhee S. J. Vac. Sci. Technol. A. 16:1998;419.
13. Tolman C.A. Chem. Rev. 77:1977;313.
14. Advances in Chemical Engineering, vol. 8, Academic Press, New York, 1970, p. 300.
15. Grady A.S., Puntambekar S.G., Russell D.K. Spectrochim. Acta, 47A. 1991;47.
16. Russell D.K. Cooord. Chem. Rev. 112:1992;131.
17. Zhu N., Cacouris T., Scarmozzino R., Osgood R.M. Jr. J. Vac. Sci. Technol. B. 10:1992;1167.
18. Matsumiya Y., Kitahara K., Ohtsuka N., Nakajima K. Jpn. J. Appl. Phys. 34:1995;L17.
19. Kawamoto H., Sakaue H., Takehiro S. Jpn. J. Appl. Phys. 29:1990;2657.