Residual strain in semi-insulating InP wafers treated by multiple-step wafer annealing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 2 B, 1999, Pages 1156-1157

  Fukuzawa, Masayuki ^a   Herms, Martin ^a,c   Uchida, Masayuki ^b   Oda, Osamu ^b   Yamada, Masayoshi ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN ENERGY CORPORATION   (Japan)

^c TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

InP; Multiple step wafer annealing; Photoelastic characterization; Residual strain; SIRP

Indexed keywords

ANNEALING; LIGHT POLARIZATION; PHOTOELASTICITY; POLARISCOPES; SEMICONDUCTING INDIUM PHOSPHIDE; STRAIN MEASUREMENT; TENSORS;

MULTI STEP WAFER ANNEALING; PHOTOELASTIC CHARACTERIZATION; PHOTOELASTIC STRAIN MEASUREMENT; RESIDUAL STRAIN; SCANNING INFRARED POLARISCOPE; SEMI INSULATING WAFERS;

SEMICONDUCTING FILMS;

EID: 0032633507     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.1156     Document Type: Article

References (14)

1. K. Kainosho, H. Shimakura, H. Yamamoto, T. Inoue and O. Oda: Proc. First Int. Conf. InP and Related Materials (IEEE, Piscataway, 1989) p. 312.
2. D. E. Holmes, R. G. Wilson and P. W. Yu: Appl. Phys. 52 (1981) 3396.
3. E. W. A. Young and G. M. Fontijn: Appl. Phys. Lett. 56 (1990) 146.
4. C. J. Miner, D. G. Knight, J. M. Zorzi, R. W. Strater, N. Puetz and M. Ikisawa: Inst. Phys. Conf. Ser. (IOP Publishing, Bristol, 1994) No. 135, p. 181.
5. M. Uchida, K. Kainosho, M. Ohta and O. Oda: J. Electron. Mater. 27 (1998) 8.
6. M. Yamada, T. Shibuya and M. Fukuzawa: Inst. Phys. Conf. Ser. (IOP Publishing, Bristol, 1994) No. 136, p. 505.
7. M. Yamada, M. Fukuzawa, T. Kawase, M. Tatsumi and K. Fujita: Inst. Phys. Conf. Ser. (IOP Publishing, Bristol, 1996) No. 145, p. 447.
8. M. Yamada, M. Fukuzawa and K. Ito: Inst. Phys. Conf. Ser. (IOP Publishing, Bristol, 1997) No. 155, p. 901.
9. M. Yamada, M. Fukuzawa, Y. Yabuhara and M. Yokogawa: Proc. 5th Int. Conf. InP and Related Materials (IEEE, Piscataway, 1993) p. 69
10. M. Fukuzawa and M. Yamada: Proc. 7th Int. Conf. InP and Related Materials (IEEE, Piscataway, 1995) p. 674.
11. M. Fukuzawa and M. Yamada: J. Electron. Mater. 25 (1996) 337.
12. M. Yamada, M. Ito and M. Fukuzawa: Proc. 10th Int. Conf. InP and Related Materials (IEEE, Piscataway, 1997) p. 209.
13. T. Chu and M. Yamada: Inst. Phys. Conf. Ser. (IOP Publishing, Bristol, 1997) No. 160, p. 129.
14. M. Yamada: Rev. Sci. Instrum. 64 (1993) 1815.