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Volumn 38, Issue 2 B, 1999, Pages 1204-1207
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Highly uniform regrown in0.53Ga0.47As/AlAs/InAs resonant tunneling diodes on in0.53Ga0.47As
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Author keywords
High electron mobility transistor; InGaAs; InP; Molecular beam epitaxy; Monolithic integration; Native oxide; Regrowth; Resonant tunneling diode
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CURRENT DENSITY;
EPITAXIAL GROWTH;
HIGH ELECTRON MOBILITY TRANSISTORS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLECULAR BEAM EPITAXY;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
MONOLITHIC INTEGRATION;
NATIVE OXIDE;
REGROWTH;
RESONANT TUNNELING DIODE;
TUNNEL DIODES;
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EID: 0032632375
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.1204 Document Type: Article |
Times cited : (9)
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References (9)
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