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Volumn 201, Issue , 1999, Pages 40-44
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Feedback control of substrate temperature during the growth of near-lattice-matched InGaAs on InP using diffuse reflection spectroscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
CLOSED LOOP CONTROL SYSTEMS;
FEEDBACK CONTROL;
MOLECULAR BEAM EPITAXY;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
SPECTROSCOPY;
TEMPERATURE CONTROL;
THERMOCOUPLES;
THREE TERM CONTROL SYSTEMS;
DIFFUSE REFLECTION SPECTROSCOPY (DRS);
SUBSTRATE TEMPERATURE;
SEMICONDUCTOR GROWTH;
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EID: 0032630063
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(98)01273-1 Document Type: Article |
Times cited : (2)
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References (12)
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