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Volumn 502, Issue , 1998, Pages 97-104
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Closed-loop control of MBE using an integrated multi-sensor system
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
CLOSED LOOP CONTROL SYSTEMS;
COMPOSITION;
COMPUTER SOFTWARE;
FEEDBACK CONTROL;
MOLECULAR BEAM EPITAXY;
REAL TIME SYSTEMS;
ROBUSTNESS (CONTROL SYSTEMS);
SEMICONDUCTOR DEVICE MANUFACTURE;
SENSORS;
TEMPERATURE CONTROL;
COMPOSITION CONTROL;
IN SITU SENSORS;
MULTIPLE SENSOR;
SEMICONDUCTOR GROWTH;
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EID: 0031642939
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (8)
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References (11)
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