Optimization of Vth roll-off in MOSFET's with advanced channel architecture - retrograde doping and pockets

IEEE Transactions on Electron Devices

Volumn 46, Issue 7, 1999, Pages 1551-1561

  Gwoziecki, Romain ^b   Skotnicki, Thomas ^a,b   Bouillon, Pierre ^b   Gentil, Pierre ^c  

^a IEEE

^b ORANGE LABS   (France)

^c Phys of Semiconduct Devices Lab   (France)

Author keywords

[No Author keywords available]

Indexed keywords

POCKET IMPLANTATION; RETROGADE CHANNEL; SHORT CHANNEL EFFECTS;

CMOS INTEGRATED CIRCUITS; OPTIMIZATION; SEMICONDUCTOR DEVICE MODELS; THRESHOLD VOLTAGE;

MOSFET DEVICES;

EID: 0032624754     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.772510     Document Type: Article

References (13)

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