Field emitters based on Si tips with AlN coating

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 692-694

  Spitsyn, B V ^a   Zhirnov, V V ^b   Blaut Bachev, A N ^a   Bormatova, L V ^b   Belyanin, A F ^c   Pashchenko, P V ^c   Bouilov, L L ^a   Givargizov, E I ^b  

^a Institute of Physical Chemistry Moscow   (Russian Federation)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^c Research Center of Hematology   (Russian Federation)

Author keywords

Aluminum nitride; Field emission; Silicon tips

Indexed keywords

ALUMINUM COMPOUNDS; COATINGS; FIELD EMISSION CATHODES; MAGNETRON SPUTTERING; SILICON;

SILICON TIPS;

NITRIDES;

EID: 0031995282     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00280-x     Document Type: Article

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