Molecular orbital theory examination into improved gate oxide integrity through the incorporation of nitrogen and fluorine

Journal of Non-Crystalline Solids

Volumn 246, Issue 1-2, 1999, Pages 73-82

  Maruizumi, Takuya ^a   Ushio, Jiro ^a   Miyao, Masanobu ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHEMICAL BONDS; COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; FLUORINE; HOLE TRAPS; MOLECULAR PHYSICS; NITROGEN; OXIDES;

BOND DISSOCIATION ENERGY; GATE OXIDE; HOT HOLE INJECTION; MOLECULAR ORBITAL PROGRAM PACKAGE; MOLECULAR ORBITAL THEORY; SYNERGETIC EFFECT;

MOS DEVICES;

EID: 0032621363     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00021-6     Document Type: Article

References (10)

1. H. Hwang, W. Ting, D. Kwong, J. Lee, in: Technical Digest of 1990 International Electron Devices Meeting, 1990, p. 421.
2. P. Chowdhury, A.I. Chou, K. Kumar, C. Lin, J.C. Lee, Appl. Phys. Lett. 70 (1997) 37.
3. Z.H. Lu, S.P. Tay, R. Cao, P. Pianetta, Appl. Phys. Lett. 67 (1995) 2836.
4. M. Hao, W. Chen, K. Lai, J. Lee, M. Gardner, J. Fulford, Appl. Phys. Lett. 66 (1995) 1126.
5. J. Stewart, J. Computer-Aided Mol. Design, 4, 1 (1990); The MOPAC program is distributed by JCPE; Program #P016 available from the JCPE office, 1-7-12, Nishinenishi, Tsuchiura City, Ibaraki 300, Japan.
6. C. Kaneta, Jpn. J. Appl. Phys. 35 (1996) 1540.
7. Y. Xu, W. Ching, Phys. Rev. B 51 (1995) 17379.
8. P.J. Wright, K.C. Saraswat, IEEE Trans. Electron Devices 36 (1989) 879.
9. G.S. Hammond, J. Am. Chem. Soc. 77 (1995) 334;
10. D. Farcasiu, J. Chem. Education 52 (1975) 76.