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Volumn 286, Issue 1-2, 1999, Pages 349-353
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White beam pin-hole patterns of implanted layers
a b c |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
DISLOCATIONS (CRYSTALS);
ION IMPLANTATION;
SEMICONDUCTING SILICON;
INTERFERENCE FRINGES;
SYNCHROTRON LAUE METHOD;
WHITE BEAM PIN-HOLE PATTERNS;
SEMICONDUCTING FILMS;
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EID: 0032614746
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-8388(98)01038-X Document Type: Article |
Times cited : (2)
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References (4)
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