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Volumn 286, Issue 1-2, 1999, Pages 349-353

White beam pin-hole patterns of implanted layers

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; DISLOCATIONS (CRYSTALS); ION IMPLANTATION; SEMICONDUCTING SILICON;

EID: 0032614746     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-8388(98)01038-X     Document Type: Article
Times cited : (2)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.