X-ray diffraction patterns in high-energy proton implanted silicon

Physica Status Solidi (A) Applied Research

Volumn 168, Issue 1, 1998, Pages 11-25

  Wieteska, K ^a   Wierzchowski, W ^b   Graeff, W ^c   DLuzewska K D ^a  

^a INSTITUTE OF ATOMIC ENERGY   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^c DESY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALS; ESTIMATION; INTEGRATION; ION IMPLANTATION; LATTICE CONSTANTS; MATHEMATICAL MODELS; PROTONS; X RAY CRYSTALLOGRAPHY;

BIERZACK-ZIEGLER THEORY; DIFFRACTION PATTERN; INTERFERENCE FRINGE; PROTON IMPLANTATION; TAGAKI-TAUPIN EQUATION;

SILICON;

EID: 0032116179     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199807)168:1<11::AID-PSSA11>3.0.CO;2-T     Document Type: Article

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