In situ measurements of methane and acetylene concentrations in a CVD reactor by infrared spectroscopy

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 166-170

  Morell, G ^a   Canales, E ^a   Weiner, B R ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

CVD; Diamond; Emission; FTIR; In situ

Indexed keywords

ABSORPTION SPECTROSCOPY; ACETYLENE; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METHANE; THIN FILMS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

DIAMOND FILMS;

EID: 0032614322     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00343-4     Document Type: Article

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