Analysis of general ambiguity of inverse ellipsometric problem

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 128-131

  Polovinkin, V G ^a   Svitasheva, S N ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Inverse ellipsometric problem; Numerical methods; Solution ambiguity; Spectroscopic ellipsometry

Indexed keywords

DIFFERENTIAL EQUATIONS; INVERSE PROBLEMS; MATHEMATICAL TRANSFORMATIONS; NUMERICAL METHODS; SPECTROMETRY; SPUTTER DEPOSITION;

SOLUTION AMBIGUITY;

ELLIPSOMETRY;

EID: 0032000272     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00798-0     Document Type: Article

References (5)

1. S.N. Svitasheva, Dokladi Acad. Sci. USSR (in Russian) 318 (1991) 1154.
2. S.N. Svitasheva, Optoelectron. Instrum. Data Process. 4 (1996) 80.
3. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
4. G.A. Korn, T.M. Korn, Mathematical Handbook, McGraw-Hill, New York, 1968.
5. S.N. Svitasheva, V.N. Kruchinin, Spectral dependence of the complex refractive index shift across the semiconductor-metal transition in thermally-oxidized vanadium, ICSE-2, Charleston, SC, USA, 12-15 May 1997, P2.15.