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Volumn 15, Issue 8, 1998, Pages 2228-2232

Analytic methods in the determination of optical properties by spectral ellipsometry

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Indexed keywords


EID: 0344592079     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.15.002228     Document Type: Article
Times cited : (5)

References (9)
  • 3
    • 0028740889 scopus 로고
    • Polynomial inversion of the single transparent layer problem in ellipsometry
    • J. P. Drolet, S. C. Russev, M. I. Boyanov, and R. M. Leblanc, “Polynomial inversion of the single transparent layer problem in ellipsometry, ” J. Opt. Soc. Am. A 11, 3284–3291 (1994).
    • (1994) J. Opt. Soc. Am. , vol.A11 , pp. 3284-3291
    • Drolet, J.P.1    Russev, S.C.2    Boyanov, M.I.3    Leblanc, R.M.4
  • 5
    • 84975655373 scopus 로고
    • The use of the biased estimator in the interpretation of spectroscopic ellipsometry data
    • G. E. Jellison, “The use of the biased estimator in the interpretation of spectroscopic ellipsometry data, ” Appl. Opt. 30, 3354–3360 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 3354-3360
    • Jellison, G.E.1
  • 6
    • 0029304872 scopus 로고
    • Determination of AlAs optical constants by variable angle spectroscopic ellipsometry and a multisample analysis
    • C. M. Herzinger, H. Yao, and P. G. Snyder, “Determination of AlAs optical constants by variable angle spectroscopic ellipsometry and a multisample analysis, ” J. Appl. Phys. 77, 4677–4687 (1995).
    • (1995) J. Appl. Phys. , vol.77 , pp. 4677-4687
    • Herzinger, C.M.1    Yao, H.2    Snyder, P.G.3
  • 8
    • 85010164329 scopus 로고
    • K. Price and R. Storn, “Differential evolution—a simple and efficient adaptive scheme for global optimization over continuous spaces, ” Tech. Rep. TR-95-012 (International Computer Science Institute, University of California at Berkeley, Berkeley, Calif., 1995).
    • (1995)
    • Price, K.1    Storn, R.2
  • 9
    • 0029713262 scopus 로고    scopus 로고
    • Minimizing the real functions of the ICEC96 contest by differential evolution
    • Institute of Electrical and Electronics Engineers, New York
    • R. Storn and K. Price, “Minimizing the real functions of the ICEC’96 contest by differential evolution, ” in Proceedings of the 1996 IEEE Conference on Evolutionary Computation (ICEC ‘96) (Institute of Electrical and Electronics Engineers, New York, 1996), pp. 842–844.
    • (1996) Proceedings of the 1996 IEEE Conference on Evolutionary Computation (ICEC ‘96) , pp. 842-844
    • Storn, R.1    Price, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.