The role of nitrogen in the deposition of polycrystalline diamond films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 215-219

  Zhang, Qing ^a   Yoon, S F ^a   Ahn, J ^a   Rusli, E ^a   Guo, Yong Ping ^b   Wee, A T S ^b   Huan, A C H ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NONE

Author keywords

CVD; Nitrogen; Polycrystalline diamond films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL GROWTH; CRYSTAL ORIENTATION; FILM GROWTH; MICROWAVES; NITROGEN; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

MICRO-RAMAN SPECTROSCOPY; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD);

DIAMOND FILMS;

EID: 0032607242     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00346-x     Document Type: Article

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