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Volumn 86, Issue 1, 1999, Pages 163-167
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Effects of plasma power on the epitaxial growth of (Ba0.48Sr0.52)TiO3 thin film
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Author keywords
[No Author keywords available]
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Indexed keywords
BARIUM COMPOUNDS;
DIELECTRIC FILMS;
EPITAXIAL GROWTH;
FILM GROWTH;
MAGNESIA;
MAGNETRON SPUTTERING;
PLASMA APPLICATIONS;
SUBSTRATES;
THIN FILMS;
X RAY SCATTERING;
BARIUM STRONTIUM TITANATE;
FERROELECTRIC MATERIALS;
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EID: 0032606537
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.370712 Document Type: Article |
Times cited : (5)
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References (15)
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