Optical and structural properties of laser annealed Er-doped amorphous silicon thin films

Journal of Applied Physics

Volumn 86, Issue 1, 1999, Pages 701-703

  Bell, M J V ^a   Nunes, L A O ^a   Zanatta, A R ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CONTINUOUS WAVE LASERS; HYDROGENATION; LIGHT ABSORPTION; LIGHT EMISSION; NEODYMIUM LASERS; PHOTOLUMINESCENCE; POSITIVE IONS; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION; THIN FILMS;

COSPUTTERING;

AMORPHOUS FILMS;

EID: 0032606328     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370788     Document Type: Article

References (18)

1. H. Ennen, J. Schneider, G. Pomrenke, and A. Axmann, Appl. Phys. Lett. 43, 943 (1983).
2. H. Ennen, G. Pomrenke, A. Axmann, k. Eisele, W. Haydl, and J. Schneider, Appl. Phys. Lett. 46, 381 (1985).
3. See, for example, A. Polman, J. Appl. Phys. 82, 1 (1997).
4. G. N. van den Hoven, J. H. Shin, A. Polman, S. Lombardo, and S. U. Campisano, J. Appl. Phys. 78, 2642 (1995).
5. R. Serna, E. Snoeks, G. van den Hoven, and A. Polman, J. Appl. Phys. 75, 2644 (1994).
6. A. R. Zanatta and L. A. O. Nunes, Appl. Phys. Lett. 71, 3679 (1997).
7. D. L. Adler, D. C. Jacobson, D. J. Eaglesham, M. A. Marcus, J. L. Benton, J. M. Poate, and P. H. Citrin, Appl. Phys. Lett. 61, 2181 (1992).
8. J. Michel, J. L. Benton, R. F. Ferrante, D. C. Jacobson, D. J. Eaglesham, E. A. Fitzgerald, Y.-H. Xie, J. M. Poate, and L. C. Kimmerling, J. Appl. Phys. 70, 2672 (1991).
9. F. G. Anderson, Appl. Phys. Lett. 68, 2421 (1996).
10. H. Przybylinska, W. Jantsch, Y. Belevitch, M. Stepikhova, L. Palmetshofer, G. Hendorfer, A. Kozanecki, R. J. Wilson, and B. J. Sealy, Phys. Rev. B 54, 2532 (1996).
11. G. Lucovsky and W. B. Pollard, in Vibrational Properties, The Physics of Hydrogenated Amorphous Silicon II, edited by J. D. Joannopoulos and G. Lucovsky, Topics in Applied Physics Vol. 56 (Springer, Berlin, 1984), p. 301.
12. A. R. Zanatta, L. A. O. Nunes, and L. R. Tessler, Appl. Phys. Lett. 70, 511 (1997); A. R. Zanatta and L. A. O. Nunes, J. Non-Cryst. Solids 227-230, 389 (1998).
13. A. R. Zanatta, L. A. O. Nunes, and L. R. Tessler, Appl. Phys. Lett. 70, 511 (1997); A. R. Zanatta and L. A. O. Nunes, J. Non-Cryst. Solids 227-230, 389 (1998).
14. Z. Iqbal and S. Veprek, J. Phys. C 15, 377 (1982).
15. R. A. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, 1991), Chap. 2.
16. J. S. Williams, W. L. Brown, H. J. Leamy, J. M. Poate, J. W. Rogers, D. Rousseau, G. A. Rozgonyi, J. A. Shelmutt, and T. T. Sheng, Appl. Phys. Lett. 33, 542 (1978).
17. F. Priolo, G. Franzo, S. Coffa, and A. Carnera, Phys. Rev. B 57, 4443 (1998).
18. M. Fujii, M. Yoshida, Y. Kanzawa, S. Hayashi, and K. Yamamoto, Appl. Phys. Lett. 71, 1198 (1997).