Spectroscopic study of CNx films grown by magnetron sputter deposition

Journal of Electron Spectroscopy and Related Phenomena

Volumn 101, Issue , 1999, Pages 551-554

  Guo, J H ^a   Zheng, W T ^b   Sathe C ^a   Hellgren, N ^b   Agui, A ^a   Sundgren, J E ^b   Nordgren, J ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; BAND STRUCTURE; CHEMICAL BONDS; ELECTRONIC STRUCTURE; EMISSION SPECTROSCOPY; FILM GROWTH; MAGNETRON SPUTTERING; NITROGEN; PHOTONS; SPUTTER DEPOSITION; THERMAL EFFECTS; X RAY SPECTROSCOPY;

CARBON NITRIDE;

NITRIDES;

EID: 0032595771     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0368-2048(98)00350-8     Document Type: Article

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