Growth of nitrogen stabilized cubic ZrO2 phase by reactive magnetron sputtering using two reactive gases

Vacuum

Volumn 55, Issue 2, 1999, Pages 153-157

  Collard, S ^a   Kupfer, H ^a   Hoyer, W ^a   Hecht, G ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; MAGNETRON SPUTTERING; MICROANALYSIS; NITRIDES; NITROGEN; OXYGEN; PHASE TRANSITIONS; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS; ZIRCONIA;

BRAGG-BRENTANO SCANS; OXYNITRIDE COATINGS; POLE FIGURE MEASUREMENT; ZIRCONIUM NITRIDE;

PROTECTIVE COATINGS;

EID: 0032594972     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00142-6     Document Type: Article

References (8)

1. Askeland D.R. Materialwissenschaften. 1996;418-419 Spektrum Akademischer Verlag Heidelberg, Berlin, Oxford.
2. Fancey K.S.et al. Mat Sci Engng A. 163(2):1993;171.
3. Qadri S.B.et al. J Vac Sci Technol A. 9(3):1991;510.
4. Khor K.A., Yang J. Surf Coat Technol. 96:1997;313.
5. Wong M.S.et al. Surf Coat Technol. 86-87:1996;381.
6. Collard S.et al. Surf Coat Technol. 112:1999;181.
7. de Keijser Th.H., Mittemeijer E.J., Rozendaal H.C.F. J Appl Cryst. 16:1983;309.
8. Chernock W.P., Beck P.A. J Appl Phys. 23:1952;341.