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Volumn 8, Issue 8-9, 1999, Pages 1654-1658
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ArF (193 nm) laser ablation of poly(methyl methacrylate)
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Author keywords
FTIR analysis of a C:H films; Optical emission spectroscopy; Polymer targets; UV laser ablation
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Indexed keywords
AMORPHOUS FILMS;
ARGON;
CARBON;
DEPOSITION;
ELECTRIC EXCITATION;
EXCIMER LASERS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HELIUM;
HYDROGEN;
LASER ABLATION;
PRESSURE;
SODIUM CHLORIDE;
LANGMUIR PROBE MEASUREMENTS;
PULSED LASER ABLATION;
TEMPORALLY RESOLVED MEASUREMENTS;
POLYMETHYL METHACRYLATES;
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EID: 0032594166
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(99)00053-9 Document Type: Article |
Times cited : (18)
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References (13)
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