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Volumn 417, Issue 1, 1998, Pages 107-120

Thermodesorption mass spectrometry study of the adsorption of Sb on misoriented Si (111)

(5) Muller P a Ranguis, A a Ladeveze M a Arnaud D'Avitaya, F a Treglia G a

Author keywords

Adsorption kinetics; Antimony; Auger electron spectroscopy (AES); Chemisorption; Computer simulations; Silicon; Single crystal surfaces; Sticking; Surface structure, morphology, roughness, and topography; Thermal desorption

Indexed keywords

ANTIMONY; COMPUTER SIMULATION; SILICON; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE STRUCTURE; TEMPERATURE PROGRAMMED DESORPTION;

MISORIENTED CRYSTALS;

CHEMISORPTION;

EID: 0032497761 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(98)00675-X Document Type: Article

Times cited : (8)

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