Adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) on Si(100) 2×1 and porous silicon surfaces

Surface Science

Volumn 418, Issue 2, 1998, Pages 353-366

  Okada, L A ^a   Dillon, A C ^a   Ott, A W ^a   George, S M ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Infrared absorption spectroscopy; Laser induced thermal desorption (LITD); Silane; silicon; Single crystal interface; Surface chemical reaction; Thermal desorption spectroscopy

Indexed keywords

ADSORPTION; ANNEALING; AUGER ELECTRON SPECTROSCOPY; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); MOLECULAR VIBRATIONS; POROUS SILICON; SEMICONDUCTING SILICON; SILANES; SINGLE CRYSTALS; TEMPERATURE PROGRAMMED DESORPTION;

LASER INDUCED THERMAL DESORPTION; SINGLE CRYSTAL INTERFACE;

SURFACE PROPERTIES;

EID: 0032488142     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00653-0     Document Type: Article

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