Alcohol-assisted growth of copper CVD films

Thin Solid Films

Volumn 320, Issue 1, 1998, Pages 86-94

  Borgharkar, Narendra S ^a   Griffin, Gregory L ^a   James, Alicia ^a   Maverick, Andrew W ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Alcohol; Chemical vapor deposition; Copper; Cu(hfac)2; Kinetics; Mechanism

Indexed keywords

ALCOHOLS; CHARGE TRANSFER; CHEMICAL VAPOR DEPOSITION; COPPER; HYDROGEN; MODIFICATION; REACTION KINETICS; REDUCTION; THIN FILMS;

ALCOHOL ASSISTED GROWTH; COPPER THIN FILM; GROWTH RATE;

FILM GROWTH;

EID: 0032482002     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01074-2     Document Type: Article

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