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Journal of Crystal Growth

Volumn 195, Issue 1-4, 1998, Pages 79-84

Zinc doping of InP by metal organic vapour phase diffusion (MOVPD)

(4) Van Geelen, A a De Smet, T M F a Van Dongen, T a Van Gils, W M E M a

a PHILIPS RESEARCH LABORATORIES (Netherlands)

Author keywords

Diffusion; InP, III V; MOVPE; Photodiodes; Zinc doping

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; DIFFUSION IN SOLIDS; METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; PHOTODIODES; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SEMICONDUCTOR LASERS; ZINC;

METALORGANIC VAPOR PHASE DIFFUSION (MOVPD);

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032477213 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(98)00628-9 Document Type: Article

Times cited : (24)

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