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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 144, Issue 1-4, 1998, Pages 186-192

The FEL's role in next-generation process technology

(1) Kelley, Michael J a

a DUPONT COMPANY (United States)

Author keywords

FEL; Micromachining; Pulsed laser deposition; Rapid thermal processing

Indexed keywords

DEPOSITION; MICROMACHINING; PRECISION ENGINEERING; PULSED LASER APPLICATIONS; RAPID THERMAL ANNEALING;

PULSED LASER DEPOSITION; RAPID THERMAL PROCESSING;

FREE ELECTRON LASERS;

EID: 0032475369 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00307-3 Document Type: Article

Times cited : (4)

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