Effect of the annealing temperature on structural and piezoelectric properties of the sol-gel Pb(Zr0.56Ti0.44)0.90(Mg1/3Nb 2/3)0.10O3 films

Thin Solid Films

Volumn 315, Issue 1-2, 1998, Pages 77-85

  Sumi, K ^a   Qiu, H ^a   Kamei, H ^a   Moriya, S ^a   Murai, M ^a   Shimada, M ^a   Nishiwaki, T ^a   Takei, K ^a   Miyashita, S ^a   Hashimoto, M ^b  

^a SEIKO EPSON CORPORATION   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

Annealing temperature; Piezoelectric properties; Sol gel films

Indexed keywords

ANNEALING; GRAIN GROWTH; PERMITTIVITY; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; SOL-GELS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

RAPID THERMAL PROCESS (RTP);

SEMICONDUCTING FILMS;

EID: 0032473220     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00705-0     Document Type: Article

References (17)

1. L.E. Cross, Jpn. J. Appl. Phys. 34 (1995) 2525.
2. Y. Ushida, N. Hirai, H. Mase, European Patent Application, No. 89305332.2, 1989.
3. M. Sakata, S. Wakabayashi, H. Goto, H. Totani, M. Takeuchi, T. Yada, Proc. IEEE 6 (1996) 263.
4. K. Hasegawa, M. Shimada, M. Sawada, US Patent, US 5530465, 1996.
5. S. Miyashita, Japan Kokai Tokk JP 06112550, 1994 (in Japanese).
6. S. Watanabe, M. Sakata, H. Goto, M. Takeuchi, T. Yada, Jpn. J. Appl. Phys. 35 (1996) 5012.
7. T. Atsuki, N. Soyama, G. Sasaki, T. Yonezawa, K. Ogi, K. Sameshima, K. Hoshiba, Y. Nakao, A. Kamisawa, Jpn. J. Appl. Phys. 33 (1994) 5196.
8. K. Amanuma, T. Mori, T. Hase, T. Sakuma, A. Ochi, Y. Miyasaka, Jpn. J. Appl. Phys. 32 (1993) 4150.
9. K.R. Udayakumar, P.J. Schuele, J. Chen, S.B. Krupanidhi, L.E. Cross, J. Appl. Phys. 77 (1995) 3981.
10. T. Mihara, H. Yoshimori, H. Watanabe, C.A.P. de Araujo, Jpn. J. Appl. Phys. 34 (1995) 2380.
11. S. Miyashita, M. Shinozuka, K. Sumi, European Patent Application, EP 736915, 1996.
12. A. Barna, Mater. Res. Soc. Symp. Proc. 254 (1991) 3.
13. J.W. Waanders, Piezoelectric Ceramics - Properties and Applications, N.V. Philips Gloeilampenfabrieken, Philips, Eindhoven, The Netherlands, 1991, p. 8.
14. M.J. Haun, Z.Q. Zhuang, E. Furman, S.J. Jang, L.E. Cross, J. Am. Ceram. Soc. 72 (1989) 1140.
15. M.J. Haun, E. Furman, S.J. Jang, L.E. Cross, Ferroelectrics and frequency control, IEEE Trans. Ultrasonics 36 (1989) 393.
16. H. Tanaka, K. Tadanaga, N. Tohge, T. Minami, Jpn. J. Appl. Phys. 349 (1995) L1155.
17. K.G. Brooks, I.M. Reaney, R. Klissurska, Y. Huang, L. Bursill, N. Setter, J. Mater. Res. 9 (1994) 2540.