Atomic force microscopy study of atomically flat (001) diamond surfaces treated with hydrogen plasma

Applied Surface Science

Volumn 125, Issue 1, 1998, Pages 120-124

  Hayashi, Kazushi ^a,c   Yamanaka, Sadanori ^a,d   Watanabe, Hideyuki ^a,e   Sekiguchi, Takashi ^b   Okushi, Hideyo ^a   Kajimura, Koji ^a,d  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c KOBE STEEL LTD   (Japan)

^d UNIVERSITY OF TSUKUBA   (Japan)

^e TOKAI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HYDROGEN; MORPHOLOGY; PLASMA APPLICATIONS; POLISHING;

ATOMICALLY FLAT DIAMOND; STEP BUNCHING;

SEMICONDUCTING DIAMONDS;

EID: 0032472135     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00580-1     Document Type: Article

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