Surface particle detection for the 0.07 μm generation and beyond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3275, Issue , 1998, Pages 90-101

  Buckner, Benjamin D ^a   Suresh, Lakkapragada ^a   Dan Hirleman, E ^a  

^a Arizona State University   (United States)

Author keywords

Defect detection; Nanoparticles; Surface inspection; Ultraviolet light scattering; X ray scattering

Indexed keywords

INTEGRATED CIRCUITS; NANOSTRUCTURED MATERIALS; OPTICAL SYSTEMS; PARTICLE SIZE ANALYSIS; PHOTODETECTORS; SCANNING; ULTRAVIOLET RADIATION; X RAY SCATTERING;

SURFACE PARTICLE DETECTION;

SURFACE STRUCTURE;

EID: 0032400663     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.304394     Document Type: Conference Paper

References (11)

1. Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties
2. Modeling of light scattering from structures with particle contaminants
3. A method of atmospheric density measurements during space shuttle entry using ultraviolet-laser Rayleigh scattering
4. Tables of the refractive index for standard air and the Rayleigh scattering coefficient for the spectral region between 0.2 and 20.0 μ and their application to atmospheric optics
5. Grazing incidence X-ray scattering evaluation of polished surface quality, and associated instrumental and residual particle effects
6. Continuous emission source covering the 50-300 Å band
7. Non-specular scattering from multilayer mirrors at normal incidence