Non-specular scattering from multilayer mirrors at normal incidence

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3113, Issue , 1997, Pages 412-419

  Gullikson, E M ^a   Stearns, D G ^a   Gaines, D P ^a   Underwood, J H ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

EUV lithography; Multilayers; Non specular scattering; Roughness

Indexed keywords

KINEMATICS; LIGHT REFLECTION; MIRRORS; MULTILAYERS; OPTICAL CORRELATION; ULTRAVIOLET RADIATION;

MULTILAYER MIRRORS;

LIGHT SCATTERING;

EID: 0031305908     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.278882     Document Type: Conference Paper

References (15)

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10. Calibration and standards beamline 6.3.2 at the advanced light source
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13. Fractal surface finish
14. Stochastic model for thin film growth and erosion