Modeling of light scattering from structures with particle contaminants

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 139-150

  Nebeker, Brent M ^a   Starr, Greg W ^a   Hirleman, E Dan ^a  

^a Department of Mechanical and Aerospace Engineering ^*  (United States)

Author keywords

Coupled dipole method; Differential scattering crosssection; Discrete dipole approximation; Light scattering; Optical inspection; Surface features

Indexed keywords

CONTAMINATION; FLAT PANEL DISPLAYS; INSPECTION; INSPECTION EQUIPMENT; LIGHT SCATTERING; POLLUTION DETECTION; SILICA; SILICON OXIDES; SILICON WAFERS; SURFACE ROUGHNESS; SURFACE SCATTERING;

COUPLED DIPOLE METHOD; DIFFERENTIAL SCATTERING; DISCRETE DIPOLE APPROXIMATION; OPTICAL INSPECTION; SURFACE FEATURE;

COHERENT SCATTERING;

EID: 0001679721     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256198     Document Type: Conference Paper

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