Chemical alteration of the native oxide layer on InP(111) by exposure to hyperthermal atomic hydrogen

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2546-2552

  Wolan, John T ^a   Hoflund, Gar B ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032355967     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581379     Document Type: Article

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