Chemical reactions induced by the room temperature interaction of hyperthermal atomic hydrogen with the native oxide layer on GaAs(001) surfaces studied by ion scattering spectroscopy and x-ray photoelectron spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2502-2507

  Wolan, John T ^a   Mount, Charles K ^a   Hoflund, Gar B ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031496952     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580761     Document Type: Article

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