Electron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 294-299

  Matsui, Jun ^a   Shibata, Mari ^a   Nakano, Nobuhiko ^a   Makabe, Toshiaki ^a,b  

^a KEIO UNIVERSITY   (Japan)

^b FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032354128     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580985     Document Type: Article

References (16)

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