Characterization of a novel lambda balanced inductive plasma source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3164-3169

  Vinogradov, G K ^a   Menagarishvili, V M ^a   Yoneyama, S ^a  

^a MC Electronics Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032348062     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581515     Document Type: Article

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