Accurate flow measurement in vacuum processing

Solid State Technology

Volumn 39, Issue 10, 1996, Pages 73-85

  Tison, S A ^a,b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW CONTROL; FLOW MEASUREMENT; FLOWMETERS; HEAT TRANSFER; PROCESS CONTROL; VACUUM TECHNOLOGY;

MASS FLOW CONTROLLERS (MFC); THERMAL MASS FLOW;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 5544291873     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (11)

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10. 5," Proc. of FLOMEKO '94, 1994.
11. P. Delajoud, M. Girard, "A high-accuracy, portable calibration standard for low mass flow," Proc. of the XIII IMEKO World Congress of Metrology, Torino, Italy, 1994.