Consequences of three-dimensional physical and electromagnetic structures on dust particle trapping in high plasma density material processing discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2454-2462

  Hwang, Helen H ^a,b   Keiter, Eric R ^a   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032329875     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581366     Document Type: Article

References (17)

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