Low temperature polycrystalline silicon thin film transistors

Vacuum

Volumn 51, Issue 4, 1998, Pages 769-775

  Jang, Jin ^a   Ryu, Jai I I ^a   Yoon, Soo Young ^a   Lee, Kyung Ha ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; ELECTRIC INSULATING MATERIALS; ELECTRODES; GATES (TRANSISTOR); LASER APPLICATIONS; LOW TEMPERATURE PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE;

FIELD EFFECT MOBILITY; LASER CRYSTALLIZATION; METAL-INDUCED CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0032321317     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00288-7     Document Type: Article

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