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Thin Solid Films

Volumn 336, Issue 1-2, 1998, Pages 53-57

Cluster-size distribution of SiGe alloys grown by MBE

(3) Pinto, N a Murri, R a Rinaldi, R b

a UNIVERSITY OF CAMERINO (Italy)

b INFM (Italy)

Author keywords

Atomic force microscopy; Cluster size distribution; Heteroepitaxy; Scanning electron microscopy; SiGe

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; MATHEMATICAL MODELS; MOLECULAR BEAM EPITAXY; PARTICLE SIZE ANALYSIS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR GROWTH;

CLUSTER-SIZE DISTRIBUTION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0032319394 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01297-8 Document Type: Article

Times cited : (7)

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