Optical micro encoder using a vertical-cavity surface-emitting laser

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 127-135

  Miyajima, Hiroshi ^a   Yamamoto, Eiji ^a   Ito, Masataka ^a   Hashimoto, Sakae ^a   Komazaki, Iwao ^a   Shinohara, Shinobu ^a   Yanagisawa, Kazuhisa ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Micro encoders; Vertical cavity surface emitting lasers

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; LASER BEAMS; OPTICAL COLLIMATORS; OPTICAL INSTRUMENT LENSES; OPTICAL RESOLVING POWER; SUBSTRATES;

MICROLENSES; OPTICAL MICRO ENCODERS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

OPTICAL SENSORS;

EID: 0030282560     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80103-3     Document Type: Article

References (10)

1. R. Sawada, Integrated optical encoder, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95)/Eurosensors IX, Stockholm, Sweden, 25-29 June, 1995, pp. 281-284.
2. H. Soda, K. Iga, C. Kitahara and Y. Suematsu, GaInAsP/InP surface emitting injection lasers, Jpn. J. Applied Phys., 18 (1979) 2329-2330.
3. E. Yamamoto, S. Hashimoto, M. Ito, I. Komazaki and K. Yanagisawa, Optical tactile sensor using surface-emitting laser, Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, Netherlands, Jan. 1995, pp. 227-231.
4. For example, H.C. Casey, Jr., and M.B. Panish, Heterostructure Lasers, Academic Press, New York, 1978.
5. For example, M. Born and E. Wolf, Principles of Optics, Pergamon, Oxford, UK, 1980.
6. M. Ito, E. Yamamoto, S. Hashimoto, I. Komazaki, H. Miyajima, S. Shinohara and K. Yanagisawa, Compound-cavity tactile sensor using surface-emitting laser, Proc. Int. Symp. Micro Machine and Human Science, Nagoya, Japan, Oct. 1995, pp. 83-88.
7. S. Haselbeck, H. Schreiber, J. Schwider and N. Streibl, Microlenses fabricated by melting a photoresist on a base layer, Opt. Eng., 32 (1993) 1322-1324.
8. O. Blum, S.P. Kilcoyne, M.E. Warren, T.C. Du, K.L. Lear, R.P. Schneider, Jr., R.F. Carson, G. Robinson and F.H. Peters, Vertical-cavity surface-emitting lasers with integrated refractive microlenses, Electron, Lett., 31 (1995) 44-45.
9. E.M. Strzelecka, G.D. Robinson, M.G. Peters, E.H. Peters and L.A. Coldren, Monolithic integration of vertical-cavity laser diodes with refractive GaAs microlenses, Electron. Lett., 31 (1995) 724-725.
10. K. Rastani, M. Orenstein, E. Kapon and A.C. Von Lehmen, Integration of planar Fresnel microlenses with vertical-cavity surface-emitting laser arrays, Opt. Lett., 16 (1991) 919-921.