Force sensing in microrobotic systems - an overview

Proceedings of the IEEE International Conference on Electronics, Circuits, and Systems

Volumn 3, Issue , 1998, Pages 259-262

  Fahlbusch, Stephan ^a   Fatikow, Sergej ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROFORCE SENSORS; MICROMANIPULATION; MICROROBOTICS; ANALYTICAL DESCRIPTION; FORCE FEEDBACK; FORCE SENSING; MICRO MANIPULATION; MICRO ROBOTICS; MICRO-FORCE SENSORS; MICRO-OBJECTS; RESEARCH ACTIVITIES;

FEEDBACK; FORCE CONTROL; PIEZOELECTRICITY; ROBOTICS; STRAIN GAGES; STRAIN MEASUREMENT;

MICROSENSORS; MICROMANIPULATORS;

EID: 0032283801     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)

1. Rembold, U., Fatikow, S.: Autonomous Micro-robots. Journal of Intelligent and Robotic Systems 19, pp. 375-391, 1997.
2. Seki, H.: Piezoelectric bimorph microgripper capable of force sensing and compliance adjustment. ASME, Japan/USA Symposium on Flexible Automation, pp. 707-713, 1992.
3. Horie, M., Funabashi, H., Ikegami, K.: A study on micro force sensors for microhandling systems. Microsystem Technologies, Vol. 1, 1995.
4. Ruther, P., Bacher, W., Feit, K., Menz. W.: LIGA-Microtesting system with integrated strain gauges for force measurement. 10th Int. Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 541-545, 1997.
5. Morishita, H., Hatamura, Y.: Development of ultra precise manipulator system for future nanotechnology. Proc. of 1st IARP Workshop on Micro Robotics and Systems, Karlsruhe, Germany, pp. 34-42, 1993.
6. Kimura, M., Fujiyoshi, M.: Force Measurement and Control of Electrostatic Micro-actuator. Proc. 2nd Int. Symp. on Micro Machine and Human Science, Nagoya, Japan, 1991.
7. Ku, S., Salcudean, S.E.: Design and Control of a Teleoperated Microgripper for Microsurgery. Int. Conf. on Robotics and Automation, Minneapolis, USA, pp. 889-894, 1996.
8. Delic, N., Detter, H., Brenner, W., Popovic, G., Vujanic, A., Hannenheim, W.: Development of Force Sensor for Microhandling Purposses. Micro System Technologies 96, Potsdam, Germany, pp. 363-368, 1996.
9. Greitmann, G., Buser, R: A Micromachined Tactile Gripper System. Microrobots: Components and Applications, SPIE Proceedings Series, Vol. 2906, Boston, pp. 2-12, 1996.
10. th Int. Conf. on Adapt. Struct., Cologne, Germany, pp. 29-41,1993.
11. Jendritza, D.,.Janocha, H., Scheer, P.: Smart actuators with piezoelectrical materials. 3rd Eu-rop. Conf. on Smart Structures and Materials, Lyon, France, 1996.
12. Janocha, H., Jendritza, D., Scheer, P., Stephan, P.: Principle of smart piezoactuators. Actuator 96, 5th Int. Conf. on New Actuators, Bremen, Germany, pp. 148-151, 1996.
13. Lee, C, Itoh, T., Maeda, R., Suga, T.: Micromachined Piezoelectric Force Sensors Based on PZT and PNNZT Thin Films. Micro System Technologies 96, 5th Int. Conf. On Micro Electro, Opto, Mechanical Systems and Components, Potsdam, Germany, pp. 357-362, 1996.
14. Breguet, J.-M., Henein, S., Mericio, R., Clavel, R.: Monolithic Piezoceramic Flexible Structures for Micromanipulation. Progress in Precision Engineering and Nanotechnologies, 9th Int. Precision Engineering Seminar, Braunschweig, Germany, Vol. 2, pp. 397-400, 1997.
15. Gibbs, M.R.J., Watts, R., Karl, W., Powell, A.L., Yates, R.B.: Microstructures containing piezomagnetic elements. Sensors and Actuators A 59, pp. 229-235, 1997.
16. Kleinke, D.K., Uras, H.M.: A magnetostrictive force sensor. Rev. Sci. Instrum. 65 (5), pp. 1699-1710, 1994.
17. Despont, M. et al.: New Design of Micromachined Capacitive Force Sensor. Micro-mechanics and Microengineering, Vol. 3, 1993.
18. Arai F., Nonoda, Y., Fukuda, T., Oota, T.: New Force Measurement and Micro Grasping Method Using Laser Raman Spectrophotometer. Int. Conf. on Robotics and Automation, Minneapolis, USA, pp. 2220-2225, 1996.