Micro fabrication by UV laser photopolymerization

Memoirs of the School of Engineering, Nagoya University

Volumn 50, Issue 1-2, 1998, Pages 33-82

  Yamaguchi, Katsumi ^a   Nakamoto, Takeshi ^a  

^a NONE

Author keywords

Absorption of light; Accuracy; Beam writing method; Diffraction of light; High aspect ratio micro part; Mask based method; Micro fabrication; Photopolymer; Solidification; Three dimensional micro part; UV laser

Indexed keywords

ASPECT RATIO; ELECTROMAGNETIC WAVE DIFFRACTION; LASER BEAM EFFECTS; LIGHT ABSORPTION; PHOTOPOLYMERIZATION; SOLIDIFICATION;

BEAM WRITING METHOD; MICROFABRICATION; ULTRAVIOLET LASERS;

POLYMERS;

EID: 0032230962     PISSN: 09190805     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (37)

1. Mehregany, M., Gabriel, K. J. and Trimmer, W. S. N., Integrated Fabrication of Polysilicon Mechanisms, IEEE Trans. Electron Devices, Vol.35, No.6 (1988), pp. 719-723.
2. Fan, L. S., Tai, Y. C. and Muller, R. S., Integrated Movable Micromechanical Structures for Sensors and Actuators, IEEE Trans. Electron Devices, Vol.35, No.6 (1988), pp. 724-730.
3. Fan, L. S., Tai, Y. C. and Muller, R. S., IC-Processed Electrostatic Micromotors, Proc. of the 1988 IEEE Electron Devices Meeting, San Francisco, CA, Dec. 11-14 (1988), pp.666-669.
4. Roylence, L. M. and Angell, J. B., A Batch-Fabricated Silicon Accelerometer, IEEE Trans. on Electron Devices, Vol. ED-26, No. 12(1979), pp. 1911-1917.
5. Petersen, K. E., Shartel, A. and Raley, N. F., Micromechanical Accelerometer Integrated with MOS Detection Circuitry, IEEE Trans. on Electron Devices, Vol. ED-29, No. 1 (1982), pp. 23-27.
6. Ehrfeld, W., The LIGA Processes for Microsystems, Micro System Technologies 90, Proceedings of 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, (1990), pp. 521-528.
7. Mohr, J., Burbaum, C., Bley, P., Menz, W. and Wallrabe, U., Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems, MicroSystem Technologies 90, Proc of 1st Int. Conf. on Micro Electro, Opto, Mechanic Systems and Components, Berlin (1990), pp. 529-537.
8. Menz, W., Bacher, W., Harmening, M. and Michel, A., The LIGA Technique - a Novel Concept for Microstructures and the Combination with Si-Technologies bv Injection Molding, Proceedings of IEEE Micro Mechanical Systems, Japan, Nara (1991), pp. 69-73.
9. Menz, W., Microactuators in LIGA Technique, Int. Journal of Applied Electromagnetics in Materials, Vol. 2, No. 4 (1992), pp. 281-284.
10. Mohr, J., Anderer, B. and Ehrfeld, W., Fabrication of a Planar Grating Spectrograph by Deep-etch Lithography with Synchrotron Radiation, Sensors and Actuators, A: Physical, Vol. 27, No. 1-3 (1991), pp. 571-575.
11. Maner, A. and Ehrfeld, W., Electroforming Technique in the LIGA Process for the Production of Microdevices, Materials and Manufacturing Process, Vol. 4, No. 4 (1989), pp. 527-537.
12. Becker, E. W., Development of the Separation Nozzle Process for Enrichment of Uranium, German Chemical Engineering, Vol. 9, No. 4 (1986), pp. 204-208.
13. Becker, E. W., Ehrfeld, W., Hagmann, P., Maner, A. and Muenchmeyer, D., Fabrication of Microstructures with High Aspect Ratio and Great Structural Height by Synchrotron Radiation Lithography, Microelectronic Engineering, Vol. 4, No. 1 (1986), pp. 35-56.
14. Rogner, A., Ehrfeld, W., Muenchmeyer, D., Bley, P., Burbaum, C. and Mohr, J., LIGA Based Flexible Microstructures for Fiber-chip Coupling, Journal of Micromechanics and Microengineering, Vol. 1, No. 3 (1991), pp. 167-170.
15. Guckel, H., Skrobis, K. J., Christenson, T. R., Klien, J., Han, S., Choi, B., Lovell, E. G. and Chapman, T. W., Fabrication and Testing of the Planar Magnetic Micromotor, Journal of Micromechanics and Microeng., Vol. 1, No. 3 (1991), pp. 135-138.
16. Burbaum, C., Mohr, J., Bley, P. and Ehrfeld, W., Fabrication of Capacitive Acceleration Sensors by LIGA Technique, Sensors and Actuators, A: Physical, Vol. 27, No. 1-3 (1991), pp. 559-563.
17. Guckel, H., Christenson, T., Skrobis, K., Metal Micromechanisms via Deep X-ray Lithography, Electroplating and Assembly, Journal of Micromech. Microeng., Vol. 2 (1992), pp. 225-228.
18. Mohr, J., Bley, P., Strohrmann, M., Wallrabe, U., Microactuators Fabricated by the LIGA Process, Journal of Micromech. Microeng., Vol. 2 (1992), pp. 234-241.
19. Lehr, H., Ehrfeld, W., Schmidt, M., Kallenbach, E., Tuan., H., Application of the LIGA Technique for the Development of Microstructures Based on Electromagnetic Principles, Journal of Micromech. Microeng., Vol. 2 (1992), pp. 229-233.
20. Guckel, H., Christenson, T., Skorbis, K., Denton, D., Choi, B., Lovel, E., Lee, J., Bajikar, S., Chapman, T., Deep X-Ray and UV Lithographies for Micromechanics, Proceedings of the IEEE Solid-State Sensor and Actuator workshop Hilton Head SC (1990), pp. 118-122.
21. Frazier, B., Babb, J. W., Allen, M. G. and Taylor, D. G., Design and Fabrication of Electroplated Micromotors Structures, Proc of ASME Winter Annual Meeting, Atlanta, Vol. DSC-32 (1991), pp. 135-146.
22. Frazier, B. A., Allen, M. G., High Aspect Ratio Electroplated Microstructures Using A Photosensitive Polyimide Process, Proceedings of the IEEE Micro Electro Mechanical Systems, Travemunde, Germany (1992), pp. 87-92.
23. Engelmann, G., Ehrmann, O., Simon, J., Reichl, H., Fabrication of High Depth-to-Width Aspect Ratio Microstructures, Proceedings of the IEEE Micro Electro Mechanical Systems, Travemunde, Germany (1992), pp. 93-98.
24. Jacobs, P. F., Rapid Prototyping & Manufacturing: Fundamentals of Stereolithography, Society of Manufacturing Engineers in cooperation with the Computer and Automated Systems Association of SME (1992).
25. Miyagi, M., Yamazaki, H., Fujimori, S., Iwasawa, A. and Funakoshi, N., Multispiral Pregrooved Disk Fabricated by a Beam Scanning Method, Japanese Journal of Applied Physics, Vol. 29, No. 5 (1990), pp. L794-797.
26. Chitayat, A., Nanometer X-Y Positioning Stages for Scanning and Stepping, Journal of Vacuum Science and Technology B, Vol. 7, No. 6 (1989), pp. 1412-1417.
27. Ehrlich, D. J. and Tsao, J. Y., Laser Microfabrication - Thin Film Processes and Lithography, Academic Press Inc., (1989).
28. Yamaguchi, K., Nakamoto, T., Abraha, P., Mibu, S., 1994, The Accuracy of Micro-molds Produced by a UV Induced Polymerization, Transactions of the ASME Journal of Engineering for Industry, Vol. 116, August (1994), pp. 370-376.
29. Abraha, P., Nakamoto, T., Yamaguchi, K. and Karyawan, The Effect of Physical Parameters on the Fabrication of Microstructures by Photo Polymerization, Advancement of Intelligent Production, (1994), pp.564-569.
30. Yamaguchi, K., Nakamoto, T., Abraha, P., Manufacruring of High Aspect Ratio Micro Structures Using UV Sensitive Photopolymer, JSME International Series C, Vol. 39, No. 2 (1996), pp.387-396.
31. Nakamoto, T., Yamaguchi, K., Abraha, P. and Mishima, K., Manufacturing of Three-dimensional Micropart by UV Laser Induced Polymerization, Journal of Micromechanics and Microeng., Vol. 6, No. 2 (1996), pp. 240-253.
32. Linfoot, E. H., Recent Advances in Optics, Oxford at the Clarendon Press, (1955).
33. Sommerfell, A., Optics, Academic Press Inc., New York (1954).
34. Yamada, T., Takato, N. and Kurokawa, T., A New Optical Circuit with a Steric Waveguide Pattern, Japanese Journal of Applied Physics, Vol. 22, No. 10 (1983), pp. L636-638.
35. Rubloff, G. W., Maskless Selected Area Processing, Journal of Vacuum Science and Technology B, Vol. 7, No.6 (1989), pp.1454-1461.
36. Kobayashi, K., Akiyama, K., Yoshizawa, I., Asakura, T., Laser-beam Scanning System Using an Acoustic-optic Deflector: Its Application to Fundus Imaging, Measurement Science and Technology, Vol. 1 (1990), pp. 151-157.
37. Hattori, K., Ikenaga, O., Wada, H., Tamamushi, S., Nishimura, E., Ikeda, N., Katoh, Y., Kusakabe, H., Yoshikawa, R., Takigawa, T., Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation, Japanese Journal of Applied Physics, Vol. 28, No. 10 (1989), pp. 2065-2069.